Hakhu, who is responsible for worldwide capital equipment development, procurement and automation, said immersion lithography still holds great interest for Intel as it continues to work on extreme ultraviolet lithography.
Echoing comments made in June Hakhu said: "We're following immersion with very close interest. I think all of us will use it."
Hakhu said most lithography suppliers were working on immersion. "If it works, we're going to use it. We still need to see . . . proof."
Hakhu added that Intel has made a series of investments in companies such as Cymer Inc., Media Lario and Nikon Corp. to facilitate EUV research aimed at developing a production tool. "The fundamental thing is the power source. We're investing in these suppliers to make sure" it can be developed.
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